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Tool Optimization for Improving Productivity and Yields
(8/28/2008) FEO Issue 4
By Victor K. F. Chia, Air Liquide Electronics, Balazs NanoAnalysis
Fuhe Li, Air Liquide Electronics, Balazs NanoAnalysis
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Currently, there are no accepted tool
parts particle, metal and organic specifications.
Very few machine shops, cleaning houses,
OEMs or fabs have developed baseline tool
parts cleanliness specifications. This paper
describes key analytical techniques for bulk
and surface characterization of tool parts.
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