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R2R in DCVD – Part 2
(8/28/2008) FEO Issue 4
By Matteo Galbiati, Numonyx
Giuseppe Fazio, Numonyx
Silvia Zoia, Numonyx
Flavio Crippa, Numonyx
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In the first part of this article (in FEO vol.
3), we introduced, as a general overview,
the run-to-run methodology and scopes,
and discussed the run-to-run pilot project
and its main objectives, showing the process
model adopted. In this second part,
we present the system integration with
automation, and how a run-to-run system
can be placed into a production scenario. At
the end of this article, we dicuss our results
and show how much a well-tuned run-torun
control can help keep in control even
the finest processes.
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