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Installing 8-inch Equipment in a 6-Inch-Generation Fab: Raising the Roof
(8/28/2008) FEO Issue 4
By Mark Crabtree, NEC Electronics America, Inc.
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An article in FEO vol. 2 described an alternative method for installing the heavier equipment. This article describes how a fab’s ceiling can be modified to accommodate the larger assembled height of some taller 8-inch equipment.

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