|
Semiconductor factory automation is a challenging task nowadays, as it has been at any time in the past. As a programmatic approach to ensure the compliance of equipment with the fab requirements, automation capabilities management (ACM) reduces the risk when implementing factory automation. This article provides an overview of past and present successes of ACM and describes new challenges and opportunities ahead.
Please login below to access the full text of this paper. If you are not currently an online member or subscriber sign-up today, it's free. For online membership, click here.
Not a member? Signup today, it's free.
|